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US9355922B2 US14/514,213 US201414514213A US9355922B2 US 9355922 B2 US9355922 B2 US 9355922B2 US 201414514213 A US201414514213 A US 201414514213A US 9355922 B2 US9355922 B2 US 9355922B2 Authority US United States Prior art keywords plasma flowing etch source gases products Prior art date 2014-10-14 Legal status (The legal status is an assumption and is not a legal conclusion.

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